| 000 | 00514nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 140908s9999 xx 000 0 und d | ||
| 020 | _a0070585024 | ||
| 040 | _aNISER LIBRARY | ||
| 041 | _aEnglish | ||
| 082 |
_a539.216 _bSMI-T |
||
| 100 | _aSmith, Donald L. | ||
| 245 |
_aThin-film deposition: principles and practice _cDonald L. Smith |
||
| 260 |
_aBoston _bMcGraw Hill _c1995 |
||
| 300 | _axxiii, 616p. | ||
| 650 | _aTHIN FILM DEVICES | ||
| 650 | _aTHIN FILMS | ||
| 650 | _aVAPOR-PLATING | ||
| 942 | _cBK | ||
| 999 |
_c9048 _d9048 |
||