| 000 | 00633nam a2200229Ia 4500 | ||
|---|---|---|---|
| 008 | 140908s9999 xx 000 0 und d | ||
| 020 | _a9780849308260 | ||
| 040 | _aNISER LIBRARY | ||
| 041 | _aEnglish | ||
| 082 |
_a621.382 _bMAD-F |
||
| 100 | _aMadou, M J | ||
| 245 |
_aFundamentals of microfabrication: the science of miniaturization _cM J. Madou |
||
| 250 | _a2nd ed. | ||
| 260 |
_aBoca Raton _bCRC _c2002 |
||
| 300 | _a723p. | ||
| 650 | _aINTEGRATED CIRCUITS -DESIGN AND CONSTRUCTION | ||
| 650 | _aLASERS | ||
| 650 | _aMACHINING | ||
| 650 | _aMICROELECTRONIC PACKAGING | ||
| 650 | _aMICROELECTRONICS | ||
| 942 | _cBK | ||
| 999 |
_c8606 _d8606 |
||