000			00677nam a2200241Ia 4500
008			140908s9999 xx 000 0 und d
020			_a9780387290225
040			_aNISER LIBRARY
041			_aEnglish
082			_a620.3 _bSOL-P
100			_aSolgaard, O
245			_aPhotonic microsystems: micro and nanotechnology applied to optical devices and systems _cOlav Solgaard
260			_aNew York _bSpringer _c2009
300			_axvi,631p.
440			_aMEMS reference shelf
500			_aRef sec.
650			_aELECTROMAGNETIC
650			_aNANOTECHNOLOGY
650			_aOPTICAL FIBER
650			_aPHOTONIC MICROSYSTEMS
650			_aWAVE GUIDES
942			_cBK
999			_c7429 _d7429