| 000 | 00458nam a22001817a 4500 | ||
|---|---|---|---|
| 999 |
_c30017 _d30017 |
||
| 005 | 20190610181618.0 | ||
| 008 | 190610b ||||| |||| 00| 0 eng d | ||
| 020 | _a9781842651513 | ||
| 040 | _aNISER LIBRARY | ||
| 041 | _aEnglish | ||
| 082 |
_a539.216 _bKON-P |
||
| 100 | _aKonuma,Mitsuharu | ||
| 245 | _aPlasma techniques for film deposition | ||
| 260 |
_aUK _bAlpha Science _c2005 |
||
| 300 | _aviii,337 p. | ||
| 650 | _aFILM DEPOSITION | ||
| 942 | _cBK | ||