| 000 | 00593nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 140908s9999 xx 000 0 und d | ||
| 020 | _a0815514832 | ||
| 040 | _aNISER LIBRARY | ||
| 041 | _aEnglish | ||
| 082 |
_a539.216 _bWAS-T |
||
| 100 | _aWasa, Kiyotaka | ||
| 245 |
_aThin film materials technology: sputtering of compound materials _cKiyotaka Wasa, Makoto Kitabatake and Hideaki Adachi |
||
| 260 |
_aNew York _bWilliam Andrew Publishing _c2004 |
||
| 300 | _axiv, 518p. | ||
| 650 | _aCATHODE SPUTTERING | ||
| 650 | _aTHIN FILMS | ||
| 700 |
_aKitabatake, Makoto _4Auth. |
||
| 942 | _cBK | ||
| 999 |
_c2859 _d2859 |
||