000			00903nmm a2200289Ia 4500
008			140908s9999 xx 000 0 und d
020			_a9783540736073, 978-3-540-73607-3
040			_aNISER LIBRARY
041			_aEnglish
082			_a620.115, _b23
245			_aThermal Transport for Applications in Micro/Nanomachining
260			_aBerlin, Heidelberg _bSpringer Berlin Heidelberg _c2008.
500			_aChemistry and Materials Science (Springer-11644)
650			_aElectronics and Microelectronics, Instrumentation
650			_aEngineering, general
650			_aChemistry
650			_aChemistry
650			_aElectronics
650			_aEngineering
650			_aNanotechnology
650			_aNanotechnology
650			_aThermodynamics
650			_aThermodynamics
700			_aWong, Basil T., author.
856			_uhttp://dx.doi.org/10.1007/978-3-540-73607-3
942			_cEB
999			_c19932 _d19932