TY  - DATA
AU  - Nazarov, Alexei., editor.
TI  - Semiconductor-On-Insulator Materials for Nanoelectronics Applications
SN  - 9783642158681, 978-3-642-15868-1
U1  - 620.5, 
PY  - 2011///
CY  - Berlin, Heidelberg
PB  - Springer Berlin Heidelberg
KW  - Characterization and Evaluation of Materials
KW  - Engineering
KW  - Nanotechnology
KW  - Nanotechnology and Microengineering
KW  - Semiconductors
KW  - Surfaces (Physics)
N1  - Chemistry and Materials Science (Springer-11644)
UR  - http://dx.doi.org/10.1007/978-3-642-15868-1
ER  -