Plasma electronics: applications in microelectronics device fabrication T. Makabe and Z. Petrovic

By: Makabe, TContributor(s): Petrovic, Z [Auth.]Material type: Text

TextLanguage: English Series: Series in plasma physicsPublication details: New York Taylor and Francis 2006 Description: 339pISBN: 9780750309769DDC classification: 621.3.049.77

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Book	NISER LIBRARY	621.3.049.77 MAK-P (Browse shelf(Opens below))	R (REFERENCE)		5303

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